Issued Patents All Time
Showing 26–50 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 8018578 | Pellicle, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2011-09-13 |
| 7965380 | Lithographic apparatus and device manufacturing method | Kars Zeger Troost | 2011-06-21 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7911586 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager | 2011-03-22 |
| 7894041 | Limiting a portion of a patterning device used to pattern a beam | — | 2011-02-22 |
| 7894037 | Lithographic apparatus and device manufacturing method | Aschwin Lodewijk Hendricus Johannes Van Meer | 2011-02-22 |
| 7872244 | Lithographic apparatus and device manufacturing method | Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more | 2011-01-18 |
| 7859647 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Marce Mathijs Theodore Marie Dierichs, Stanislav Smirnov, Christian Wagner, Lev Ryzhikov +1 more | 2010-12-28 |
| 7826035 | Lithographic apparatus and device manufacturing method | — | 2010-11-02 |
| 7791708 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Johannes Hendrikus Gertrudis Franssen, Rene Theodorus Petrus Compen, Johannes Theodorus Guillielmus Maria Van De Ven, Egbert Dirk Stam +2 more | 2010-09-07 |
| 7791732 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2010-09-07 |
| 7773199 | Methods and systems to compensate for a stitching disturbance of a printed pattern | Wenceslao A. Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky | 2010-08-10 |
| 7728956 | Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation data | Kars Zeger Troost, Adrianus Johannes Henricus Maas | 2010-06-01 |
| 7713667 | System and method for generating pattern data used to control a pattern generator | Azat Latypov, Jang Fung Chen, Kars Zeger Troost | 2010-05-11 |
| 7697128 | Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object | Robert Snel, Hedser Van Brug | 2010-04-13 |
| 7688423 | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones | Wenceslao A. Cebuhar, Azat Latypov | 2010-03-30 |
| 7671968 | Lithographic apparatus having masking parts and device manufacturing method | Erik Roelof Loopstra, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2010-03-02 |
| 7630054 | Methods and systems to compensate for a stitching disturbance of a printed pattern | Wenceslao A. Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky | 2009-12-08 |
| 7548302 | Lithographic apparatus and device manufacturing method | Donis Flagello, Robert John Socha, James Greeneich, Kars Zeger Troost | 2009-06-16 |
| 7522266 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager | 2009-04-21 |
| 7508494 | Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate | Dominicus Jacobus Petrus Adrianus Franken, Johannes Hendrikus Gertrudis Franssen, Johannes Theodorus Guillielmus Maria Van De Ven, Michiel Puyt, Teun Peterus Adrianus De Wilt | 2009-03-24 |
| 7499146 | Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping | Kars Zeger Troost, Johannes Jacobus Matheus Baselmans, Louis John Markoya, Neal Callan, Nicholas K. Eib | 2009-03-03 |
| 7474384 | Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus | Dominicus Jacobus Petrus Adrianus Franken, Stephen Roux, Michael L. Nelson | 2009-01-06 |
| 7459710 | Lithographic apparatus, method for calibrating and device manufacturing method | Johannes Jacobus Matheus Baselmans | 2008-12-02 |