Issued Patents All Time
Showing 76–100 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7141340 | Lithographic apparatus, programmable patterning structure, device manufacturing method, and device manufactured thereby | — | 2006-11-28 |
| 7133121 | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region | Wenceslao A. Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky | 2006-11-07 |
| 7133118 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager | 2006-11-07 |
| 7123348 | Lithographic apparatus and method utilizing dose control | Kars Zeger Troost | 2006-10-17 |
| 7119881 | Lithographic apparatus and device manufacturing method | — | 2006-10-10 |
| 7102732 | Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element | Pieter Willem Herman De Jager, Pieter Kruit, Karel Diederick Van Der Mast | 2006-09-05 |
| 7102733 | System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool | Azat Latypov, Christopher Mason, Sherman K. Poultney | 2006-09-05 |
| 7061591 | Maskless lithography systems and methods utilizing spatial light modulator arrays | Wenceslao A. Cebuhar, Jason Hintersteiner | 2006-06-13 |
| 7053981 | Lithographic apparatus and device manufacturing method | — | 2006-05-30 |
| 7046413 | System and method for dose control in a lithographic system | Jason Hintersteiner, Karel Diederick Van Der Mast | 2006-05-16 |
| 7023525 | Imaging apparatus | Pieter Willem Herman De Jager, Jason Hintersteiner, Borgert Kruizinga, Matthew Eugene McCarthy, Mark Oskotsky +6 more | 2006-04-04 |
| 7016015 | Lithographic apparatus and device manufacturing method | — | 2006-03-21 |
| 7009682 | Lithographic apparatus and device manufacturing method | — | 2006-03-07 |
| 7002666 | Lithographic apparatus and device manufacturing method | — | 2006-02-21 |
| 6999161 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jozef Petrus Henricus Benschop | 2006-02-14 |
| 6992754 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2006-01-31 |
| 6989920 | System and method for dose control in a lithographic system | Jason Hintersteiner, Karel Diederick Van Der Mast | 2006-01-24 |
| 6876440 | METHODS AND SYSTEMS TO COMPENSATE FOR A STITCHING DISTURBANCE OF A PRINTED PATTERN IN A MASKLESS LITHOGRAPHY SYSTEM UTILIZING OVERLAP OF EXPOSURE ZONES WITH ATTENUATION OF THE AERIAL IMAGE IN THE OVERLAP REGION | Wenceslao A. Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky | 2005-04-05 |
| 6870601 | Lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Harry Borggreve | 2005-03-22 |
| 6864958 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2005-03-08 |
| 6778257 | Imaging apparatus | Pieter Willem Herman De Jager, Jason Hintersteiner, Borgert Kruizinga, Matthew Eugene McCarthy, Mark Oskotsky +6 more | 2004-08-17 |
| 6646274 | Lithographic projection apparatus | — | 2003-11-11 |
| 6633366 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Pieter Willem Herman De Jager, Pieter Kruit, Karel Diederick Van Der Mast | 2003-10-14 |
| 6429440 | Lithography apparatus having a dynamically variable illumination beam | — | 2002-08-06 |
| 6362871 | Lithographic apparatus | — | 2002-03-26 |