Issued Patents All Time
Showing 51–75 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459710 | Lithographic apparatus, method for calibrating and device manufacturing method | Johannes Jacobus Matheus Baselmans | 2008-12-02 |
| 7440078 | Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units | Kars Zeger Troost | 2008-10-21 |
| 7433033 | Inspection method and apparatus using same | Vadim Yevgenyevich Banine, Johannes Onvlee, Jacques Cor Johan Van Der Donck, Michiel Peter Oderwald | 2008-10-07 |
| 7428040 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager, Joost Sytsma | 2008-09-23 |
| 7410736 | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones | Wenceslao A. Cebuhar, Azat Latypov | 2008-08-12 |
| 7411652 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken, Peter Kochersperger, Kars Zeger Troost | 2008-08-12 |
| 7403266 | Maskless lithography systems and methods utilizing spatial light modulator arrays | Wenceslao A. Cebuhar, Jason Hintersteiner, Andrew W. McCullough, Solomon Wasserman, Karel Diederick Van Der Mast | 2008-07-22 |
| 7400382 | Light patterning device using tilting mirrors in a superpixel form | Nabila Baba-Ali, Kars Zeger Troost | 2008-07-15 |
| 7394524 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jozef Petrus Henricus Benschop | 2008-07-01 |
| 7388650 | Lithographic apparatus and device manufacturing method | — | 2008-06-17 |
| 7385677 | Lithographic apparatus and device manufacturing method that limits a portion of a patterning device used to pattern a beam | — | 2008-06-10 |
| 7379579 | Imaging apparatus | Karel Diederick Van Der Mast | 2008-05-27 |
| 7321417 | Spatial light modulator, lithographic apparatus and device manufacturing method | — | 2008-01-22 |
| 7304718 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Kars Zeger Troost | 2007-12-04 |
| 7274502 | System, apparatus and method for maskless lithography that emulates binary, attenuating phase-shift and alternating phase-shift masks | Nabila Baba-Ali | 2007-09-25 |
| 7259829 | Lithographic apparatus and device manufacturing method | Wim Tjibbo Tel | 2007-08-21 |
| 7239393 | Calibration method for a lithographic apparatus and device manufacturing method | Henricus Wilhelmus Maria Van Buel, Joeri Lof | 2007-07-03 |
| 7196772 | Lithographic apparatus and device manufacturing method | — | 2007-03-27 |
| 7190434 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Pieter Willem Herman De Jager, Joost Sytsma | 2007-03-13 |
| 7183566 | Lithographic apparatus for manufacturing a device | Johannes Jacobus Matheus Baselmans | 2007-02-27 |
| 7177012 | Lithographic apparatus and device manufacturing method | Kars Zeger Troost | 2007-02-13 |
| 7173687 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jozef Petrus Henricus Benschop | 2007-02-06 |
| 7167231 | Method and apparatus for printing large data flows | Anders Thuren, Karel Diederick Van Der Mast | 2007-01-23 |
| 7161661 | Lithographic apparatus and device manufacturing method | — | 2007-01-09 |
| 7154587 | Spatial light modulator, lithographic apparatus and device manufacturing method | — | 2006-12-26 |