Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525642 | Lithographic apparatus and device manufacturing method | Markus Franciscus Antonius Eurlings | 2009-04-28 |
| 7508487 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Willem Van Schaik, Vadim Yevgenyevich Banine, Levinus Pieter Bakker +1 more | 2009-03-24 |
| 7397535 | Lithographic apparatus and device manufacturing method | — | 2008-07-08 |
| 7312850 | Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution | Hako Botma | 2007-12-25 |
| 7224440 | Lithographic apparatus and device manufacturing method | Stefan Geerte Kruijswijk, Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings | 2007-05-29 |
| 7038763 | Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method | Hendrikus Robertus Marie Van Greevenbroek | 2006-05-02 |
| 7030958 | Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method | Cornelis Petrus Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Martinus Van Duijnhoven, Markus Franciscus Antonius Eurlings +3 more | 2006-04-18 |
| 6958806 | Lithographic apparatus and device manufacturing method | Jan Hoegee, Armand Eugene Albert Koolen | 2005-10-25 |
| 6862076 | Method of determining stray radiation lithographic projection apparatus | Marco Hugo Petrus Moers | 2005-03-01 |
| 6737662 | Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product | Jan Bernard Plechelmus Van Schoot, Markus Franciscus Antonius Eurlings, Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2004-05-18 |