Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007693 | Laser focussing module | Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Tolga Ergin, Andreas Hopf +7 more | 2024-06-11 |
| 11237491 | Reflective optical element for a radiation beam | Ramon Mark Hofstra, François Deneuville, Gerardus Hubertus Petrus Maria Swinkels, Petrus Adrianus Theodorus Maria Ruijs | 2022-02-01 |
| 10295916 | EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus | Heine Melle Mulder, Willem Van Schaik | 2019-05-21 |
| 9360762 | Illumination system, lithographic apparatus and method | — | 2016-06-07 |
| 7834980 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans | 2010-11-16 |