Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2022-05-24 |
| 9192039 | Radiation source | Antonius Theodorus Wilhelmus Kempen, Erik Roelof Loopstra, Corne Rentrop, Dennis De Graaf, Frits Gubbels +1 more | 2015-11-17 |