| 8507882 |
Radiation source and lithographic apparatus |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors |
2013-08-13 |
| 8462826 |
Laser device |
Erik Roelof Loopstra, Erik Petrus Buurman |
2013-06-11 |
| 8431916 |
Radiation source and lithographic apparatus |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Erik Petrus Buurman |
2013-04-30 |
| 8405055 |
Source module, radiation source and lithographic apparatus |
Dzmitry Labetski, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors |
2013-03-26 |
| 8373846 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Johannes Josephina Moors |
2013-02-12 |
| 8368040 |
Radiation system and lithographic apparatus |
Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Andrei Mikhailovich Yakunin, Dennis De Graaf +1 more |
2013-02-05 |
| 8368032 |
Radiation source, lithographic apparatus, and device manufacturing method |
Dzmitry Labetski, Erik Roelof Loopstra, Tom Van Zutphen |
2013-02-05 |
| 8115900 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2012-02-14 |
| 7883886 |
Device for cereal malting |
— |
2011-02-08 |