Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10588211 | Radiation source having debris control | Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Niek Antonius Jacobus Maria Kleemans +3 more | 2020-03-10 |
| 8253123 | Method and device for generating EUV radiation or soft X-rays with enhanced efficiency | Jeroen Jonkers, Felix Kuepper, Jakob Willi Neff | 2012-08-28 |