Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10542612 | Device and method for providing power to gas discharge lamp | Anatoli Saveliev | 2020-01-21 |
| 9455586 | Method for controlling an EUV source | Mohamad Hussein El-Husseini | 2016-09-27 |
| 9253865 | Method of calibrating a DPP-generated EUV light source | Mohamad Hussein El-Husseini, Takahiro Hiraoka | 2016-02-02 |
| 8227777 | Method and apparatus for operating an electrical discharge device | MICHAEL LOEKEN, Jakob Willi Neff, Juergen Klein | 2012-07-24 |