Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321107 | Extreme ultraviolet light source device and protection method for receiving plate member | Hironobu Yabuta | 2025-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321107 | Extreme ultraviolet light source device and protection method for receiving plate member | Hironobu Yabuta | 2025-06-03 |