Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399437 | Debris mitigation device and light source apparatus including the same | Hironobu Yabuta | 2025-08-26 |
| 11631579 | Extreme ultraviolet light source apparatus and plasma position adjusting method | — | 2023-04-18 |
| 9599812 | Foil trap and light source device using such foil trap | Christof Metzmacher, Hermann Giese, Achim Weber, Hironobu Yabuta, Rolf Theo Anton Apetz +2 more | 2017-03-21 |