Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292690 | Insert for a source chamber of an EUV radiation source | Juan Jose Hasbun Wood, Iris Pilch, Christof Metzmacher | 2025-05-06 |
| 11550225 | EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source | Iris Pilch, Juan Jose Hasbun Wood, Christof Metzmacher | 2023-01-10 |