Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7365350 | Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma | Jesko Brudermann, Bjoern Mader, René De Bruijn, Juergen Kleinschmidt | 2008-04-29 |
| 7079224 | Arrangement for debris reduction in a radiation source based on a plasma | Juergen Kleinschmidt | 2006-07-18 |
| 5368710 | Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window | Ching-Hwa Chen, David R. Liu | 1994-11-29 |
| 5226967 | Plasma apparatus including dielectric window for inducing a uniform electric field in a plasma chamber | Ching-Hwa Chen, David R. Liu | 1993-07-13 |
| 4627089 | Device for positioning a flattening filter in the center of an X-ray radiation | George Menor, Rolando Tayag | 1986-12-02 |