Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974321 | Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation source | Juergen Kleinschmidt | 2011-07-05 |
| 7755070 | Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source | René De Bruijn, Chinh Duc Tran, Bjoern Mader, Juergen Kleinschmidt | 2010-07-13 |
| 7750327 | Device for the generation of a gas curtain for plasma-based EUV radiation sources | Chinh Duc Tran, Bjoern Mader, Gilbert Dornieden, Thomas Brauner | 2010-07-06 |
| 7365350 | Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma | Duc Tran, Bjoern Mader, René De Bruijn, Juergen Kleinschmidt | 2008-04-29 |