Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7750327 | Device for the generation of a gas curtain for plasma-based EUV radiation sources | Chinh Duc Tran, Jesko Brudermann, Bjoern Mader, Thomas Brauner | 2010-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7750327 | Device for the generation of a gas curtain for plasma-based EUV radiation sources | Chinh Duc Tran, Jesko Brudermann, Bjoern Mader, Thomas Brauner | 2010-07-06 |