Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7755070 | Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source | René De Bruijn, Bjoern Mader, Jesko Brudermann, Juergen Kleinschmidt | 2010-07-13 |
| 7750327 | Device for the generation of a gas curtain for plasma-based EUV radiation sources | Jesko Brudermann, Bjoern Mader, Gilbert Dornieden, Thomas Brauner | 2010-07-06 |