Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563853 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Sergei V. Govorkov, Marcus Serwazi, Thomas Jünemann | 2003-05-13 |
| 6553050 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-04-22 |
| 6516012 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-02-04 |
| 6476987 | Excimer laser with line narrowing | Peter Heist, Matthias Kramer | 2002-11-05 |
| 6421365 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2002-07-16 |