Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965624 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more | 2005-11-15 |
| 6946669 | Arrangement for the generation of EUV radiation with high repetition rates | — | 2005-09-20 |
| 6914920 | Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources | — | 2005-07-05 |
| 6894285 | Arrangement for monitoring the energy radiated by an EUV radiation source | Uwe Stamm | 2005-05-17 |
| 6894298 | Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge | Imtiaz Ahmad, Guido Schriever | 2005-05-17 |
| 6865212 | Method for energy control of pulsed driven, gas discharged-coupled beam sources | — | 2005-03-08 |
| 6856638 | Resonator arrangement for bandwidth control | Konstantin Aab, Peter Lokai, Matthias Ulrich | 2005-02-15 |
| 6855932 | Detector arrangement for energy measurement of pulsed x-ray radiation | Guido Schriever | 2005-02-15 |
| 6834066 | Stabilization technique for high repetition rate gas discharge lasers | Igor Bragin, Vadim Berger | 2004-12-21 |
| 6829261 | Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation | — | 2004-12-07 |
| 6815900 | Radiation source with high average EUV radiation output | Imtiaz Ahmad, Guido Schriever, Uwe Stamm, Sven Goetze | 2004-11-09 |
| 6801561 | Laser system and method for spectral narrowing through wavefront correction | — | 2004-10-05 |
| 6795473 | Narrow band excimer laser with a prism-grating as line-narrowing optical element | Thomas Schroeder | 2004-09-21 |
| 6792023 | Method and apparatus for reduction of spectral fluctuations | Peter Lokai, Konstantin Aab | 2004-09-14 |
| 6747741 | Multiple-pass interferometric device | — | 2004-06-08 |
| 6721345 | Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers | Igor Bragin, Gerhard Ahlborn | 2004-04-13 |
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Sergei V. Govorkov, Peter Lokai, Uwe Stamm | 2004-04-06 |
| 6700916 | E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems | Matthias Kramer, Gunter Nowinski, Marcus Serwazi | 2004-03-02 |
| 6700915 | Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections | — | 2004-03-02 |
| 6678291 | Molecular fluorine laser | Klaus Vogler | 2004-01-13 |
| 6667804 | Temperature compensation method for wavemeters | — | 2003-12-23 |
| 6603789 | Narrow band excimer or molecular fluorine laser with improved beam parameters | — | 2003-08-05 |
| 6577665 | Molecular fluorine laser | Klaus Vogler | 2003-06-10 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Uwe Stamm, Igor Bragin | 2003-05-27 |
| 6567451 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-05-20 |