Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7414253 | EUV radiation source with high radiation output based on a gas discharge | Juergen Kleinschmidt, Jens Ringling | 2008-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7414253 | EUV radiation source with high radiation output based on a gas discharge | Juergen Kleinschmidt, Jens Ringling | 2008-08-19 |