Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310690 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2016-04-12 |
| 8786849 | Method for measuring an optical system | Christian Hettich, Michael Layh, Ulrich Wegmann, Karl-Heinz Schuster, Matthias Manger | 2014-07-22 |
| 5690056 | Squirrel proof bird feeder | — | 1997-11-25 |