Issued Patents All Time
Showing 26–50 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8804234 | Catadioptric projection objective including an aspherized plate | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2014-08-12 |
| 8730572 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2014-05-20 |
| 8446665 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2013-05-21 |
| 8416490 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2013-04-09 |
| 8390784 | Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method | — | 2013-03-05 |
| 8363315 | Catadioptric projection objective with mirror group | Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, David Shafer | 2013-01-29 |
| 8355201 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2013-01-15 |
| 8345222 | High transmission, high aperture catadioptric projection objective and projection exposure apparatus | Daniel Kraehmer, Ralf Mueller, Thomas Schicketanz, Wilhelm Ulrich | 2013-01-01 |
| 8345350 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Heiko Feldmann, Hans-Juergen Rostalski | 2013-01-01 |
| 8339701 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2012-12-25 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Norbert Wabra +6 more | 2012-11-27 |
| 8310752 | Method of manufacturing a projection objective and projection objective | Heiko Feldmann, Toralf Gruner | 2012-11-13 |
| 8300211 | Catadioptric projection objective | Toralf Gruner, Ralf Mueller | 2012-10-30 |
| 8289619 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2012-10-16 |
| 8208198 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-26 |
| 8208199 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-26 |
| 8199400 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-12 |
| 8107162 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2012-01-31 |
| 8068276 | Projection objective for lithography | Heiko Feldmann, Susanne Beder, Aurelian Dodoc, Hans-Juergen Rostalski | 2011-11-29 |
| 8064040 | Projection objective, projection exposure apparatus and reflective reticle for microlithography | Aurelian Dodoc, Wilhelm Ulrich, Dieter Bader | 2011-11-22 |
| 8004756 | Chromatically corrected catadioptric objective and projection exposure apparatus including the same | — | 2011-08-23 |
| 7869122 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2011-01-11 |
| 7835073 | Projection objective for lithography | Heiko Feldmann, Susanne Beder, Aurelian Dodoc, Hans-Juergen Rostalski | 2010-11-16 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Norbert Wabra +6 more | 2010-08-24 |
| 7760425 | Chromatically corrected catadioptric objective and projection exposure apparatus including the same | — | 2010-07-20 |