Issued Patents All Time
Showing 76–84 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7023627 | Lithographic objective having a first lens group including only lenses having a positive refractive power | Karl-Heinz Schuster | 2006-04-04 |
| 7006304 | Catadioptric reduction lens | Helmut Beierl | 2006-02-28 |
| 6995930 | Catadioptric projection objective with geometric beam splitting | David Shafer, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich | 2006-02-07 |
| 6831794 | Objective with at least one aspheric lens | Karl-Heinz Schuster, Frank Schillke, Franz-Josef Stickel | 2004-12-14 |
| 6806942 | Projection exposure system | Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer +2 more | 2004-10-19 |
| 6788387 | Lithographic objective having a first lens group including only lenses having a positive refractive power | Karl-Heinz Schuster | 2004-09-07 |
| 6765729 | Catadioptric reduction lens | Jean-Claude Perrin, Wilhelm Ulrich | 2004-07-20 |
| 6717746 | Catadioptric reduction lens | Helmut Beierl | 2004-04-06 |
| 6680803 | Partial objective in an illuminating systems | Jorg Schultz, Alexander Sohmer, Johannes Wangler, Christa Muller | 2004-01-20 |