Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281824 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2019-05-07 |
| 9097984 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2015-08-04 |
| 8659744 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Norbert Wabra, Toralf Gruner, Boris Bittner, Volker Graeschus | 2014-02-25 |
| 8174676 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Norbert Wabra, Toralf Gruner, Boris Bittner, Volker Graeschus | 2012-05-08 |