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Mirko Buechsenschuetz

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
📍 Schweinfurt, DE: #300 of 509 inventorsTop 60%
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Patent #TitleCo-InventorsDate
12372877 Projection exposure apparatus for semiconductor lithography Markus Raab, Andreas Raba, Matthias Manger 2025-07-29