Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9720328 | Projection exposure system for microlithography and method of monitoring a lateral imaging stability | Matthias Manger, Ulrich Mueller | 2017-08-01 |
| 9235142 | Projection exposure system for microlithography and method of monitoring a lateral imaging stability | Matthias Manger, Ulrich Mueller | 2016-01-12 |