Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7456933 | Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus | Vladimir Kamenov, Thomas Muelders, Toralf Gruner, Markus Mengel | 2008-11-25 |
| 7436521 | Optical measuring apparatus and operating method for imaging error correction in an optical imaging system | Wolfgang Emer, Martin Schriever, Rainer Hoch | 2008-10-14 |
| 7417745 | Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry | Helmut Haidner, Wolfgang Emer, Rainer Hoch, Martin Schriever, Markus Goeppert | 2008-08-26 |
| 7408652 | Device and method for the optical measurement of an optical system by using an immersion fluid | Uwe Schellhorn, Joachim Stuehler, Helmut Haidner, Albrecht Ehrmann, Martin Schriever +1 more | 2008-08-05 |
| 7365861 | Method and apparatus for determining telecentricity and microlithography projection exposure apparatus | — | 2008-04-29 |
| 7352452 | Method and apparatus for setting optical imaging properties by means of radiation treatment | Eric Eva | 2008-04-01 |
| 7336371 | Apparatus and method for measuring the wavefront of an optical system | Helmut Haidner, Markus Goeppert, Martin Schriever | 2008-02-26 |
| 7333216 | Apparatus for wavefront detection | Helmut Haidner, Martin Schriever | 2008-02-19 |
| 7307707 | Method and system for measuring the imaging quality of an optical imaging system | — | 2007-12-11 |
| 7301646 | Device and method for the determination of imaging errors and microlithography projection exposure system | Helmut Haidner, Gordon Doering | 2007-11-27 |
| 7286245 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser | Michael Hartl, Markus Mengel, Manfred Dahl, Helmut Haidner, Martin Schriever +1 more | 2007-10-23 |
| 7283204 | Method of producing an optical imaging system | — | 2007-10-16 |
| 7277182 | Apparatus for polarization-specific examination, optical imaging system, and calibration method | Markus Mengel | 2007-10-02 |
| 7233386 | Method of optimizing imaging performance | Gerd Reisinger, Manfred Maul, Paul Graeupner, Martin Schriever | 2007-06-19 |
| 7230220 | Method of determining optical properties and projection exposure system comprising a wavefront detection system | Steffen Lauer, Wolfgang Emer, Harald Sakowski, Martin Schriever | 2007-06-12 |
| 7158237 | Interferometric measuring device and projection exposure installation comprising such measuring device | Martin Schriever, Helmut Haidner | 2007-01-02 |
| 7088458 | Apparatus and method for measuring an optical imaging system, and detector unit | — | 2006-08-08 |
| 7075633 | Method and system for measuring the imaging quality of an optical imaging system | — | 2006-07-11 |
| 7019824 | Moire method and measuring system for measuring the distortion of an optical imaging system | Uwe Schellhorn, Ralph Klaesges, Joachim Stuehler | 2006-03-28 |