Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5397664 | Phase mask for projection lithography and method for the manufacture thereof | Christoph Noelscher | 1995-03-14 |
| 5284724 | Phase mask for projection lithography and method for the manufacture thereof comprising a selectively etchable phase shift layer directly on substrate | Christoph Noelscher | 1994-02-08 |