Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686098 | Lithography method and lithography mask | Gunther Czech, Carsten Fülber, Rainer Käsmaier, Dietrich Widmann | 2004-02-03 |
| 6660437 | Alternating phase mask | Uwe Griesinger, Michael Heissmeier, Burkhard Ludwig, Molela Moukara, Rainer Pforr | 2003-12-09 |
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Uwe Griesinger, Rainer Pforr, Dietrich Widmann, Andreas Grassmann | 2003-10-21 |
| 6631511 | Generating mask layout data for simulation of lithographic processes | Henning Haffner, Armin Semmler | 2003-10-07 |
| 6466373 | Trimming mask with semitransparent phase-shifting regions | Rainer Pforr, Klaus Ergenzinger, Fritz Gans, Uwe Griesinger, Wilhelm Maurer +1 more | 2002-10-15 |