Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730463 | Method for determining and removing phase conflicts on alternating phase masks | Markus Hofsäss, Burkhard Ludwig, Molela Moukara, Christoph Nolscher | 2004-05-04 |
| 6680151 | Alternating phase mask | Markus Hofsäss, Burkhard Ludwig, Molela Moukara, Christoph Nolscher | 2004-01-20 |
| 6660437 | Alternating phase mask | Christoph Friedrich, Uwe Griesinger, Burkhard Ludwig, Molela Moukara, Rainer Pforr | 2003-12-09 |