Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7424144 | Method for checking periodic structures on lithography masks | Roderick Koehle | 2008-09-09 |
| 7262850 | Method for inspection of periodic grating structures on lithography masks | Wolfgang Dettmann, Roderick Koehle | 2007-08-28 |
| 7108798 | Defect repair method, in particular for repairing quartz defects on alternating phase shift masks | Ralf Ludwig | 2006-09-19 |
| 6756164 | Exposure mask with repaired dummy structure and method of repairing an exposure mask | Torsten Franke, Henning Haffner, Armin Semmler | 2004-06-29 |