Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939224 | Mask with registration marks and method of fabricating integrated circuits | Andreas Jahnke, Torsten Maehr | 2011-05-10 |
| 7207030 | Method for improving a simulation model of photolithographic projection | Bernd Küchler, Christoph Nolscher | 2007-04-17 |
| 7096127 | Measuring flare in semiconductor lithography | David Ziger, Frank E. Goodwin | 2006-08-22 |