Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653367 | Methods including a processing of wafers and spin coating tool | Martin Freitag, Arthur Hotzel | 2017-05-16 |
| 7939224 | Mask with registration marks and method of fabricating integrated circuits | Andreas Jahnke, Ralf Ziebold | 2011-05-10 |