Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Peter Moll, Martin Schmidt, Carsten Hartig, Matthias Ruhm, Stefan Rongen +3 more | 2018-10-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Peter Moll, Martin Schmidt, Carsten Hartig, Matthias Ruhm, Stefan Rongen +3 more | 2018-10-30 |