Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253472 | System and method for detecting a defect in a specimen | Roberto Schiwon, Matthias Ruhm, Dirk Wollstein | 2025-03-18 |
| 11036912 | Overlay optimization | Ian R. Krumanocker | 2021-06-15 |
| 10788806 | Initializing individual exposure field parameters of an overlay controller | Eyup Cinar | 2020-09-29 |
| 10754319 | Across-wafer profile control in semiconductor processes | Dinesh Balasubra Manian, Houssam Lazkani | 2020-08-25 |
| 10481592 | Selecting manufacturing settings based on historical data from manufacturing tools | Dirk Gleitsmann, Daniel Zschaebitz | 2019-11-19 |
| 10289109 | Methods of error detection in fabrication processes | Eugene Barash, James Broc Stirton, Daniel Kost | 2019-05-14 |
| 10241502 | Methods of error detection in fabrication processes | Eugene Barash, James Broc Stirton | 2019-03-26 |
| 8180471 | Tuning a process controller based on a dynamic sampling rate | J. Broc Stirton, Detlef Pabst | 2012-05-15 |
| 8103478 | Method and system for semiconductor process control and monitoring by using PCA models of reduced size | Daniel Kost | 2012-01-24 |
| 7974801 | Method and system for a two-step prediction of a quality distribution of semiconductor devices | — | 2011-07-05 |
| 7908109 | Identifying manufacturing disturbances using preliminary electrical test data | Lothar Waetzold, Thomas Depaly | 2011-03-15 |
| 7831324 | Method and system for randomizing wafers in a complex process line | James Broc Stirton | 2010-11-09 |
| 7738986 | Method and apparatus for compensating metrology data for site bias prior to filtering | James Broc Stirton, Kevin R. Lensing | 2010-06-15 |
| 7565254 | Method and apparatus for metrology sampling using combination sampling rules | James Broc Stirton | 2009-07-21 |
| 7542880 | Time weighted moving average filter | Kevin Andrew Chamness, Uwe Schulze | 2009-06-02 |
| 7460968 | Method and apparatus for selecting wafers for sampling | Matthew A. Purdy | 2008-12-02 |
| 7330800 | Method and apparatus for selecting sites for sampling | James Broc Stirton | 2008-02-12 |
| 7233835 | Method and system for estimating a state of an uninitialized advanced process controller by using segregated controller data | Uwe Schulze | 2007-06-19 |
| 6985825 | Method and apparatus for adaptive sampling based on process covariance | Timothy L. Jackson, Brian K. Cusson | 2006-01-10 |
| 6959224 | Probability constrained optimization for electrical fabrication control | Gregory A. Cherry, Jin Wang | 2005-10-25 |