Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748088 | Method, storage medium and system for controlling the processing of lots of workpieces | Gero Grau, Steffen Kalisch, Joerg Weigang, William J. Fosnight, Chinmay Oza | 2017-08-29 |
| 9632499 | Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits | Chinmay Oza, Gero Grau, William J. Fosnight | 2017-04-25 |
| 8180471 | Tuning a process controller based on a dynamic sampling rate | Richard P. Good, J. Broc Stirton | 2012-05-15 |