Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8180471 | Tuning a process controller based on a dynamic sampling rate | Richard P. Good, Detlef Pabst | 2012-05-15 |
| 7262864 | Method and apparatus for determining grid dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, Marilyn I. Wright | 2007-08-28 |
| 7020535 | Method and apparatus for providing excitation for a process controller | Christopher A. Bode, Robert J. Chong | 2006-03-28 |
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, Marilyn I. Wright | 2004-10-12 |
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, Marilyn I. Wright | 2003-11-18 |