| 7774670 |
Method and apparatus for dynamically determining tester recipes |
Douglas C. Kimbrough, Eric O. Green, Robert J. Chong |
2010-08-10 |
$9,033,000 |
| 7695986 |
Method and apparatus for modifying process selectivities based on process state information |
Matthew A. Purdy, Matthew S. Ryskoski |
2010-04-13 |
$12,774,000 |
| 7502702 |
Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities |
Christopher A. Bode, Kevin R. Lensing |
2009-03-10 |
$4,539,000 |
| 7445945 |
Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test data |
Christopher A. Bode |
2008-11-04 |
$32,235,000 |
| 7402257 |
Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same |
Thomas J. Sonderman |
2008-07-22 |
$4,320,000 |
| 7337091 |
Method and apparatus for coordinating fault detection settings and process control changes |
— |
2008-02-26 |
$8,371,000 |
| 7321993 |
Method and apparatus for fault detection classification of multiple tools based upon external data |
Elfido Coss, Jr. |
2008-01-22 |
$21,379,000 |
| 7292959 |
Total tool control for semiconductor manufacturing |
Thomas J. Sonderman |
2007-11-06 |
$9,214,000 |
| 7289867 |
Automated integrated circuit device manufacturing facility using distributed control |
Chandrashekar Krishnaswamy |
2007-10-30 |
$11,707,000 |
| 7262864 |
Method and apparatus for determining grid dimensions using scatterometry |
Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright |
2007-08-28 |
$7,142,000 |
| 7257458 |
Automated integrated circuit device manufacturing facility using central control |
— |
2007-08-14 |
$3,919,000 |
| 7254453 |
Secondary process controller for supplementing a primary process controller |
Thomas J. Sonderman |
2007-08-07 |
$6,329,000 |
| 7153709 |
Method and apparatus for calibrating degradable components using process state data |
Matthew A. Purdy |
2006-12-26 |
$21,181,000 |
| 7100081 |
Method and apparatus for fault classification based on residual vectors |
Matthew A. Purdy, Robert J. Chong, Gregory A. Cherry |
2006-08-29 |
$13,087,000 |
| 7031793 |
Conflict resolution among multiple controllers |
Naomi M. Jenkins, Jin Wang, Elfido Coss, Jr., Brian K. Cusson |
2006-04-18 |
$11,889,000 |
| 6991945 |
Fault detection spanning multiple processes |
Howard E. Castle, Matthew A. Purdy, Gregory A. Cherry, Eric O. Green, Michael L. Miller +1 more |
2006-01-31 |
$15,487,000 |
| 6988225 |
Verifying a fault detection result based on a process control state |
Matthew A. Purdy, Timothy L. Jackson |
2006-01-17 |
$20,825,000 |
| 6960774 |
Fault detection and control methodologies for ion implantation processes, and system for performing same |
Elfido Coss, Jr., Patrick M. Cowan, Tom Tse |
2005-11-01 |
$12,702,000 |
| 6925347 |
Process control based on an estimated process result |
Michael L. Miller, Thomas J. Sonderman, Alexander J. Pasadyn, Brian K. Cusson, Patrick M. Cowan +2 more |
2005-08-02 |
$7,108,000 |
| 6907369 |
Method and apparatus for modifying design constraints based on observed performance |
Robert J. Chong, Alexander J. Pasadyn |
2005-06-14 |
$5,811,000 |
| 6875622 |
Method and apparatus for determining electromagnetic properties of a process layer using scatterometry measurements |
— |
2005-04-05 |
$7,987,000 |
| 6815235 |
Methods of controlling formation of metal silicide regions, and system for performing same |
— |
2004-11-09 |
$3,568,000 |
| 6804014 |
Method and apparatus for determining contact opening dimensions using scatterometry |
Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright |
2004-10-12 |
$4,245,000 |
| 6794299 |
Various methods of controlling conformal film deposition processes, and a system for accomplishing same |
David W. Bennett |
2004-09-21 |
$3,701,000 |
| 6790683 |
Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same |
Terri A. Couteau |
2004-09-14 |
$2,721,000 |
