| 12140245 |
Electric field device |
Sven Rausch, Nikolai Schulz |
2024-11-12 |
|
| 8615314 |
Process control using analysis of an upstream process |
Thomas J. Sonderman, Alexander J. Pasadyn |
2013-12-24 |
$5,340,000 |
| 8321048 |
Associating data with workpieces and correlating the data with yield data |
Elfido Coss, Jr., Anastasia Oshelski Peterson |
2012-11-27 |
$2,246,000 |
| 8185230 |
Method and apparatus for predicting device electrical parameters during fabrication |
Michael L. Miller |
2012-05-22 |
$2,529,000 |
| 7797073 |
Controlling processing of semiconductor wafers based upon end of line parameters |
Alexander J. Pasadyn |
2010-09-14 |
$11,473,000 |
| 7558687 |
Method and apparatus for dynamic adjustment of a sensor sampling rate |
— |
2009-07-07 |
$14,531,000 |
| 7519447 |
Method and apparatus for integrating multiple sample plans |
Kevin R. Lensing |
2009-04-14 |
$5,338,000 |
| 7502702 |
Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities |
Richard J. Markle, Kevin R. Lensing |
2009-03-10 |
$4,539,000 |
| 7445945 |
Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test data |
Richard J. Markle |
2008-11-04 |
$32,235,000 |
| 7424392 |
Applying a self-adaptive filter to a drifting process |
Jin Wang, Robert J. Chong, Si QIN, Alexander J. Pasadyn |
2008-09-09 |
$8,320,000 |
| 7299154 |
Method and apparatus for fast disturbance detection and classification |
Qinghua He, Jin Wang |
2007-11-20 |
$5,989,000 |
| 7200459 |
Method for determining optimal photolithography overlay targets based on process performance and yield in microelectronic fabrication |
Anthony J. Toprac |
2007-04-03 |
$10,912,000 |
| 7120514 |
Method and apparatus for performing field-to-field compensation |
Joyce S. Oey Hewett |
2006-10-10 |
$21,906,000 |
| 7103439 |
Method and apparatus for initializing tool controllers based on tool event data |
Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2006-09-05 |
$18,723,000 |
| 7069103 |
Controlling cumulative wafer effects |
Matthew A. Purdy |
2006-06-27 |
$11,248,000 |
| 7020535 |
Method and apparatus for providing excitation for a process controller |
J. Broc Stirton, Robert J. Chong |
2006-03-28 |
$11,294,000 |
| 6978189 |
Matching data related to multiple metrology tools |
Matthew A. Purdy, Alexander J. Pasadyn |
2005-12-20 |
$11,866,000 |
| 6970757 |
Method and apparatus for updating control state variables of a process control model based on rework data |
Joyce S. Oey Hewett, Anthony J. Toprac, Alexander J. Pasadyn, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2005-11-29 |
$10,680,000 |
| 6957120 |
Multi-level process data representation |
Michael L. Miller |
2005-10-18 |
$5,936,000 |
| 6947803 |
Dispatch and/or disposition of material based upon an expected parameter result |
Alexander J. Pasadyn |
2005-09-20 |
$11,506,000 |
| 6937914 |
Method and apparatus for controlling process target values based on manufacturing metrics |
Thomas J. Sonderman, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2005-08-30 |
$5,346,000 |
| 6912436 |
Prioritizing an application of correction in a multi-input control system |
Gary Jones, Richard D. Edwards, Matthew A. Purdy |
2005-06-28 |
$6,294,000 |
| 6901340 |
Method and apparatus for distinguishing between sources of process variation |
Alexander J. Pasadyn, Joyce S. Oey Hewett, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2005-05-31 |
$6,268,000 |
| 6897075 |
Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information |
Alexander J. Pasadyn |
2005-05-24 |
$6,015,000 |
| 6871114 |
Updating process controller based upon fault detection analysis |
Eric O. Green, Matthew A. Purdy, Elfido Coss, Jr., Robert J. Chong, Gregory A. Cherry |
2005-03-22 |
|
