| 8615314 |
Process control using analysis of an upstream process |
Christopher A. Bode, Alexander J. Pasadyn |
2013-12-24 |
$5,340,000 |
| 8359494 |
Parallel fault detection |
Elfido Coss, Jr., Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Alexander J. Pasadyn |
2013-01-22 |
$2,344,000 |
| 8017411 |
Dynamic adaptive sampling rate for model prediction |
Alexander J. Pasadyn, Gregory A. Cherry |
2011-09-13 |
$4,525,000 |
| 7402257 |
Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same |
Richard J. Markle |
2008-07-22 |
$4,320,000 |
| 7324865 |
Run-to-run control method for automated control of metal deposition processes |
Scott Bushman, Craig W. Christian |
2008-01-29 |
$10,637,000 |
| 7292959 |
Total tool control for semiconductor manufacturing |
Richard J. Markle |
2007-11-06 |
$9,214,000 |
| 7254453 |
Secondary process controller for supplementing a primary process controller |
Richard J. Markle |
2007-08-07 |
$6,329,000 |
| 7160740 |
Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same |
Pirainder Lall |
2007-01-09 |
$41,551,000 |
| 7117062 |
Determining transmission of error effects for improving parametric performance |
Robert J. Chong, Brian K. Cusson, Alexander J. Pasadyn |
2006-10-03 |
$25,981,000 |
| 7103439 |
Method and apparatus for initializing tool controllers based on tool event data |
Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2006-09-05 |
$18,723,000 |
| 6970757 |
Method and apparatus for updating control state variables of a process control model based on rework data |
Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more |
2005-11-29 |
$10,680,000 |
| 6961636 |
Method and apparatus for dynamically monitoring controller tuning parameters |
Robert J. Chong, Alexander J. Pasadyn |
2005-11-01 |
$12,702,000 |
| 6937914 |
Method and apparatus for controlling process target values based on manufacturing metrics |
Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2005-08-30 |
$5,346,000 |
| 6925347 |
Process control based on an estimated process result |
Michael L. Miller, Alexander J. Pasadyn, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more |
2005-08-02 |
$7,108,000 |
| 6917849 |
Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters |
Alexander J. Pasadyn |
2005-07-12 |
$12,438,000 |
| 6901340 |
Method and apparatus for distinguishing between sources of process variation |
Alexander J. Pasadyn, Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson +1 more |
2005-05-31 |
$6,268,000 |
| 6850322 |
Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace |
William J. Campbell, Scott Bushman, Elfido Coss, Jr. |
2005-02-01 |
$6,992,000 |
| 6834213 |
Process control based upon a metrology delay |
Jin Wang, Naomi M. Jenkins, Elfido Coss, Jr. |
2004-12-21 |
$5,396,000 |
| 6821792 |
Method and apparatus for determining a sampling plan based on process and equipment state information |
Alexander J. Pasadyn, Christopher A. Bode |
2004-11-23 |
$3,336,000 |
| 6818561 |
Control methodology using optical emission spectroscopy derived data, system for performing same |
— |
2004-11-16 |
$6,082,000 |
| 6802045 |
Method and apparatus for incorporating control simulation environment |
Anthony J. Toprac, Anastasia Oshelski Peterson |
2004-10-05 |
$3,728,000 |
| 6801817 |
Method and apparatus for integrating multiple process controllers |
Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2004-10-05 |
$3,728,000 |
| 6800562 |
Method of controlling wafer charging effects due to manufacturing processes |
Brian K. Cusson |
2004-10-05 |
$3,728,000 |
| 6785586 |
Method and apparatus for adaptively scheduling tool maintenance |
Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2004-08-31 |
$2,273,000 |
| 6773931 |
Dynamic targeting for a process control system |
Alexander J. Pasadyn, Jin Wang |
2004-08-10 |
$1,968,000 |
