Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8615314 | Process control using analysis of an upstream process | Christopher A. Bode, Alexander J. Pasadyn | 2013-12-24 |
| 8359494 | Parallel fault detection | Elfido Coss, Jr., Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Alexander J. Pasadyn | 2013-01-22 |
| 8017411 | Dynamic adaptive sampling rate for model prediction | Alexander J. Pasadyn, Gregory A. Cherry | 2011-09-13 |
| 7402257 | Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same | Richard J. Markle | 2008-07-22 |
| 7324865 | Run-to-run control method for automated control of metal deposition processes | Scott Bushman, Craig W. Christian | 2008-01-29 |
| 7292959 | Total tool control for semiconductor manufacturing | Richard J. Markle | 2007-11-06 |
| 7254453 | Secondary process controller for supplementing a primary process controller | Richard J. Markle | 2007-08-07 |
| 7160740 | Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same | Pirainder Lall | 2007-01-09 |
| 7117062 | Determining transmission of error effects for improving parametric performance | Robert J. Chong, Brian K. Cusson, Alexander J. Pasadyn | 2006-10-03 |
| 7103439 | Method and apparatus for initializing tool controllers based on tool event data | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2006-09-05 |
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2005-11-29 |
| 6961636 | Method and apparatus for dynamically monitoring controller tuning parameters | Robert J. Chong, Alexander J. Pasadyn | 2005-11-01 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Alexander J. Pasadyn, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6917849 | Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters | Alexander J. Pasadyn | 2005-07-12 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Alexander J. Pasadyn, Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson +1 more | 2005-05-31 |
| 6850322 | Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace | William J. Campbell, Scott Bushman, Elfido Coss, Jr. | 2005-02-01 |
| 6834213 | Process control based upon a metrology delay | Jin Wang, Naomi M. Jenkins, Elfido Coss, Jr. | 2004-12-21 |
| 6821792 | Method and apparatus for determining a sampling plan based on process and equipment state information | Alexander J. Pasadyn, Christopher A. Bode | 2004-11-23 |
| 6818561 | Control methodology using optical emission spectroscopy derived data, system for performing same | — | 2004-11-16 |
| 6802045 | Method and apparatus for incorporating control simulation environment | Anthony J. Toprac, Anastasia Oshelski Peterson | 2004-10-05 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-10-05 |
| 6800562 | Method of controlling wafer charging effects due to manufacturing processes | Brian K. Cusson | 2004-10-05 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-08-31 |
| 6773931 | Dynamic targeting for a process control system | Alexander J. Pasadyn, Jin Wang | 2004-08-10 |