Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6751518 | Dynamic process state adjustment of a processing tool to reduce non-uniformity | Alexander J. Pasadyn, Christopher A. Bode | 2004-06-15 |
| 6745086 | Method and apparatus for determining control actions incorporating defectivity effects | Alexander J. Pasadyn, Christopher A. Bode | 2004-06-01 |
| 6708075 | Method and apparatus for utilizing integrated metrology data as feed-forward data | Alexander J. Pasadyn, Christopher A. Bode | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2004-03-02 |
| 6678570 | Method and apparatus for determining output characteristics using tool state data | Alexander J. Pasadyn | 2004-01-13 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-01-06 |
| 6660539 | Methods for dynamically controlling etch endpoint time, and system for accomplishing same | Alexander J. Pasadyn | 2003-12-09 |
| 6650957 | Method and apparatus for run-to-run control of deposition process | William J. Campbell, Craig W. Christian | 2003-11-18 |
| 6650955 | Method and apparatus for determining a sampling plan based on process and equipment fingerprinting | Alexander J. Pasadyn, Christopher A. Bode | 2003-11-18 |
| 6645780 | Method and apparatus for combining integrated and offline metrology for process control | Alexander J. Pasadyn | 2003-11-11 |
| 6617258 | Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same | Matthew S. Ryskoski | 2003-09-09 |
| 6615098 | Method and apparatus for controlling a tool using a baseline control script | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2003-09-02 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Elfido Coss, Jr., Qingsu Wang | 2003-04-08 |
| 6524774 | Method of controlling photoresist thickness based upon photoresist viscosity | — | 2003-02-25 |
| 6511898 | Method for controlling deposition parameters based on polysilicon grain size feedback | Jeremy Lansford, Anthony J. Toprac | 2003-01-28 |
| 6470230 | Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication | Anthony J. Toprac, Michael L. Miller | 2002-10-22 |
| 6465263 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Elfido Coss, Jr., Robert Anderson | 2002-10-15 |
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Craig W. Christian | 2002-09-24 |
| 6449524 | Method and apparatus for using equipment state data for run-to-run control of manufacturing tools | Michael L. Miller | 2002-09-10 |
| 6444481 | Method and apparatus for controlling a plating process | Alexander J. Pasadyn | 2002-09-03 |
| 6387823 | Method and apparatus for controlling deposition process using residual gas analysis | Anthony J. Toprac | 2002-05-14 |
| 6284622 | Method for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Craig W. Christian | 2001-09-04 |
| 6258681 | Use of a rapid thermal anneal process to control drive current | H. Jim Fulford | 2001-07-10 |