| 8615314 |
Process control using analysis of an upstream process |
Thomas J. Sonderman, Christopher A. Bode |
2013-12-24 |
$5,340,000 |
| 8359494 |
Parallel fault detection |
Elfido Coss, Jr., Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Thomas J. Sonderman |
2013-01-22 |
$2,344,000 |
| 8017411 |
Dynamic adaptive sampling rate for model prediction |
Thomas J. Sonderman, Gregory A. Cherry |
2011-09-13 |
$4,525,000 |
| 7797073 |
Controlling processing of semiconductor wafers based upon end of line parameters |
Christopher A. Bode |
2010-09-14 |
$11,473,000 |
| 7581140 |
Initiating test runs based on fault detection results |
Elfido Coss, Jr., Brian K. Cusson, Naomi M. Jenkins |
2009-08-25 |
$16,717,000 |
| 7424392 |
Applying a self-adaptive filter to a drifting process |
Jin Wang, Robert J. Chong, Christopher A. Bode, Si QIN |
2008-09-09 |
$8,320,000 |
| 7117062 |
Determining transmission of error effects for improving parametric performance |
Thomas J. Sonderman, Robert J. Chong, Brian K. Cusson |
2006-10-03 |
$25,981,000 |
| 7103439 |
Method and apparatus for initializing tool controllers based on tool event data |
Christopher A. Bode, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2006-09-05 |
$18,723,000 |
| 7067333 |
Method and apparatus for implementing competing control models |
Matthew A. Purdy |
2006-06-27 |
$11,248,000 |
| 6988017 |
Adaptive sampling method for improved control in semiconductor manufacturing |
Anthony J. Toprac, Michael L. Miller |
2006-01-17 |
$20,825,000 |
| 6978189 |
Matching data related to multiple metrology tools |
Christopher A. Bode, Matthew A. Purdy |
2005-12-20 |
$11,866,000 |
| 6970757 |
Method and apparatus for updating control state variables of a process control model based on rework data |
Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2005-11-29 |
$10,680,000 |
| 6969672 |
Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operation |
Joyce S. Oey Hewett |
2005-11-29 |
$10,680,000 |
| 6968252 |
Method and apparatus for dispatching based on metrology tool performance |
James Broc Stirton |
2005-11-22 |
$6,256,000 |
| 6961636 |
Method and apparatus for dynamically monitoring controller tuning parameters |
Robert J. Chong, Thomas J. Sonderman |
2005-11-01 |
$12,702,000 |
| 6947803 |
Dispatch and/or disposition of material based upon an expected parameter result |
Christopher A. Bode |
2005-09-20 |
$11,506,000 |
| 6937914 |
Method and apparatus for controlling process target values based on manufacturing metrics |
Christopher A. Bode, Thomas J. Sonderman, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more |
2005-08-30 |
$5,346,000 |
| 6925347 |
Process control based on an estimated process result |
Michael L. Miller, Thomas J. Sonderman, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more |
2005-08-02 |
$7,108,000 |
| 6917849 |
Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters |
Thomas J. Sonderman |
2005-07-12 |
$12,438,000 |
| 6912433 |
Determining a next tool state based on fault detection information |
Robert J. Chong, Michael L. Miller, Eric O. Green |
2005-06-28 |
$6,294,000 |
| 6907369 |
Method and apparatus for modifying design constraints based on observed performance |
Richard J. Markle, Robert J. Chong |
2005-06-14 |
$5,811,000 |
| 6901340 |
Method and apparatus for distinguishing between sources of process variation |
Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more |
2005-05-31 |
$6,268,000 |
| 6897075 |
Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information |
Christopher A. Bode |
2005-05-24 |
$6,015,000 |
| 6821792 |
Method and apparatus for determining a sampling plan based on process and equipment state information |
Thomas J. Sonderman, Christopher A. Bode |
2004-11-23 |
$3,336,000 |
| 6823231 |
Tuning of a process control based upon layer dependencies |
Christopher A. Bode |
2004-11-23 |
$3,336,000 |
