| 8359494 |
Parallel fault detection |
Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Thomas J. Sonderman, Alexander J. Pasadyn |
2013-01-22 |
$2,344,000 |
| 8321048 |
Associating data with workpieces and correlating the data with yield data |
Anastasia Oshelski Peterson, Christopher A. Bode |
2012-11-27 |
$2,246,000 |
| 7788065 |
Method and apparatus for correlating test equipment health and test results |
Eric O. Green, Rajesh Vijayaraghavan |
2010-08-31 |
$5,571,000 |
| 7783455 |
Methods and systems for analyzing process equipment processing variations using sensor data |
— |
2010-08-24 |
$5,281,000 |
| 7716004 |
Method and apparatus for matching test equipment calibration |
Kevin R. Lensing, Eric O. Green, Rajesh Vijayaraghavan |
2010-05-11 |
$11,612,000 |
| 7581140 |
Initiating test runs based on fault detection results |
Alexander J. Pasadyn, Brian K. Cusson, Naomi M. Jenkins |
2009-08-25 |
$16,717,000 |
| 7321993 |
Method and apparatus for fault detection classification of multiple tools based upon external data |
Richard J. Markle |
2008-01-22 |
$21,379,000 |
| 7200779 |
Fault notification based on a severity level |
Susan Hickey, Michael R. Conboy |
2007-04-03 |
$10,912,000 |
| 7130769 |
Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same |
Sam Allen, Michael R. Conboy |
2006-10-31 |
$12,737,000 |
| 7092779 |
Automated material handling system for a manufacturing facility divided into separate fabrication areas |
Michael R. Conboy, Danny C. Shedd |
2006-08-15 |
|
| 7051250 |
Routing workpieces based upon detecting a fault |
Sam Allen, Michael R. Conboy, Michael L. Miller |
2006-05-23 |
$17,017,000 |
| 7039495 |
Management of multiple types of empty carriers in automated material handling systems |
Michael R. Conboy, Patrick J. Ryan |
2006-05-02 |
$21,137,000 |
| 7031793 |
Conflict resolution among multiple controllers |
Naomi M. Jenkins, Jin Wang, Richard J. Markle, Brian K. Cusson |
2006-04-18 |
$11,889,000 |
| 6968303 |
Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing |
Qingsu Wang |
2005-11-22 |
$6,256,000 |
| 6960774 |
Fault detection and control methodologies for ion implantation processes, and system for performing same |
Patrick M. Cowan, Richard J. Markle, Tom Tse |
2005-11-01 |
$12,702,000 |
| 6954883 |
Method and apparatus for performing fault detection using data from a database |
Michael R. Conboy, Susan Hickey |
2005-10-11 |
$12,751,000 |
| 6928333 |
Scheduling method for automated work-cell transfer system |
Michael R. Conboy, Patrick J. Ryan |
2005-08-09 |
$9,550,000 |
| 6905895 |
Predicting process excursions based upon tool state variables |
Mark K. Sze-To |
2005-06-14 |
$5,811,000 |
| 6871112 |
Method for requesting trace data reports from FDC semiconductor fabrication processes |
Michael R. Conboy, Bryce A. Hendrix |
2005-03-22 |
$6,839,000 |
| 6871114 |
Updating process controller based upon fault detection analysis |
Eric O. Green, Matthew A. Purdy, Christopher A. Bode, Robert J. Chong, Gregory A. Cherry |
2005-03-22 |
|
| 6868512 |
Fault detection system with real-time database |
Michael L. Miller |
2005-03-15 |
$4,259,000 |
| 6850322 |
Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace |
William J. Campbell, Scott Bushman, Thomas J. Sonderman |
2005-02-01 |
$6,992,000 |
| 6834211 |
Adjusting a trace data rate based upon a tool state |
Brian K. Cusson |
2004-12-21 |
$5,396,000 |
| 6834213 |
Process control based upon a metrology delay |
Thomas J. Sonderman, Jin Wang, Naomi M. Jenkins |
2004-12-21 |
$5,396,000 |
| 6831555 |
Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework |
Michael L. Miller |
2004-12-14 |
$6,995,000 |
