| 8180587 |
System for brokering fault detection data |
Elfido Cross, Jr., Sam Allen |
2012-05-15 |
$7,029,000 |
| 7200779 |
Fault notification based on a severity level |
Elfido Coss, Jr., Susan Hickey |
2007-04-03 |
$10,912,000 |
| 7162326 |
Mask identification database server |
Russel Shirley, Horace Paul Bowser, Jr. |
2007-01-09 |
$41,551,000 |
| 7130769 |
Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same |
Sam Allen, Elfido Coss, Jr. |
2006-10-31 |
$12,737,000 |
| 7092779 |
Automated material handling system for a manufacturing facility divided into separate fabrication areas |
Danny C. Shedd, Elfido Coss, Jr. |
2006-08-15 |
|
| 7051250 |
Routing workpieces based upon detecting a fault |
Sam Allen, Michael L. Miller, Elfido Coss, Jr. |
2006-05-23 |
$17,017,000 |
| 7039495 |
Management of multiple types of empty carriers in automated material handling systems |
Patrick J. Ryan, Elfido Coss, Jr. |
2006-05-02 |
$21,137,000 |
| 6985794 |
Management of move requests from a factory system to an automated material handling system |
Russel Shirley, Jason Grover |
2006-01-10 |
$17,911,000 |
| 6954883 |
Method and apparatus for performing fault detection using data from a database |
Elfido Coss, Jr., Susan Hickey |
2005-10-11 |
$12,751,000 |
| 6928333 |
Scheduling method for automated work-cell transfer system |
Patrick J. Ryan, Elfido Coss, Jr. |
2005-08-09 |
$9,550,000 |
| 6895295 |
Method and apparatus for controlling a multi-chamber processing tool |
Jason Grover, Sam Allen |
2005-05-17 |
$3,810,000 |
| 6878895 |
Reticle sorter |
Patrick J. Ryan, Stephen P. Hovestol |
2005-04-12 |
$6,806,000 |
| 6871112 |
Method for requesting trace data reports from FDC semiconductor fabrication processes |
Elfido Coss, Jr., Bryce A. Hendrix |
2005-03-22 |
$6,839,000 |
| 6792389 |
Method of dynamically enabling additional sensors based upon initial sensor data, and system for accomplishing same |
Sam Allen, Elfido Coss, Jr. |
2004-09-14 |
$2,721,000 |
| 6790680 |
Determining a possible cause of a fault in a semiconductor fabrication process |
Jason Grover, Elfido Coss, Jr., Sam Allen |
2004-09-14 |
$2,721,000 |
| 6766285 |
Predictive processing method in a semiconductor processing facility |
Sam Allen, Jason Grover |
2004-07-20 |
$1,607,000 |
| 6763277 |
Method and apparatus for proactive dispatch system to improve line balancing |
Sam Allen, Jason Grover |
2004-07-13 |
$4,054,000 |
| 6763278 |
Operating a processing tool in a degraded mode upon detecting a fault |
Elfido Coss, Jr., Sam Allen |
2004-07-13 |
$4,054,000 |
| 6711450 |
Integration of business rule parameters in priority setting of wafer processing |
Elfido Coss, Jr., Jason Grover |
2004-03-23 |
$3,151,000 |
| 6699004 |
Wafer rotation in wafer handling devices |
Russel Shirley, Elfido Coss, Jr. |
2004-03-02 |
$3,635,000 |
| 6666337 |
Method and apparatus for determining wafer identity and orientation |
Sam Allen, Elfido Coss, Jr. |
2003-12-23 |
$5,236,000 |
| 6662070 |
Wafer rotation randomization in cluster tool processing |
Sam Allen, Russel Shirley, Elfido Coss, Jr. |
2003-12-09 |
$2,702,000 |
| 6662076 |
Management of move requests from a factory system to an automated material handling system |
Russel Shirley, Jason Grover |
2003-12-09 |
$2,702,000 |
| 6638778 |
Method for determining, tracking and/or controlling processing based upon silicon characteristics |
Anastasia Oshelski Peterson, Sam Allen, Jason Grover |
2003-10-28 |
$6,461,000 |
| 6629012 |
Wafer-less qualification of a processing tool |
Terrence J. Riley, Qingsu Wang, Michael L. Miller, W. Jarrett Campbell |
2003-09-30 |
$4,535,000 |
