Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6718224 | System and method for estimating error in a manufacturing process | Stacy Firth | 2004-04-06 |
| 6643596 | System and method for controlling critical dimension in a semiconductor manufacturing process | Stacy Firth | 2003-11-04 |
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Qingsu Wang, Michael R. Conboy, Michael L. Miller | 2003-09-30 |
| 6348289 | System and method for controlling polysilicon feature critical dimension during processing | Terri A. Couteau, Anthony J. Toprac | 2002-02-19 |
| 6276989 | Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing | Jeremy Lansford, Christopher H. Raeder | 2001-08-21 |