| 6790683 |
Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same |
Richard J. Markle |
2004-09-14 |
| 6566886 |
Method of detecting crystalline defects using sound waves |
Michael J. Satterfield, Laura Pressley |
2003-05-20 |
| 6524869 |
Method and apparatus for detecting ion implant induced defects |
Michael J. Satterfield, Laura Pressley, Daniel E. Sutton, Bryon K. Hance, David M. Hendrix |
2003-02-25 |
| 6492275 |
Control of transistor performance through adjustment of spacer oxide profile with a wet etch |
Deborah J. Riley |
2002-12-10 |
| 6352867 |
Method of controlling feature dimensions based upon etch chemistry concentrations |
William J. Campbell, Anthony J. Toprac |
2002-03-05 |
| 6348289 |
System and method for controlling polysilicon feature critical dimension during processing |
W. Jarrett Campbell, Anthony J. Toprac |
2002-02-19 |
| 6326313 |
Method and apparatus for partial drain during a nitride strip process step |
Stacie Y. Brown |
2001-12-04 |