Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790683 | Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same | Richard J. Markle | 2004-09-14 |
| 6566886 | Method of detecting crystalline defects using sound waves | Michael J. Satterfield, Laura Pressley | 2003-05-20 |
| 6524869 | Method and apparatus for detecting ion implant induced defects | Michael J. Satterfield, Laura Pressley, Daniel E. Sutton, Bryon K. Hance, David M. Hendrix | 2003-02-25 |
| 6492275 | Control of transistor performance through adjustment of spacer oxide profile with a wet etch | Deborah J. Riley | 2002-12-10 |
| 6352867 | Method of controlling feature dimensions based upon etch chemistry concentrations | William J. Campbell, Anthony J. Toprac | 2002-03-05 |
| 6348289 | System and method for controlling polysilicon feature critical dimension during processing | W. Jarrett Campbell, Anthony J. Toprac | 2002-02-19 |
| 6326313 | Method and apparatus for partial drain during a nitride strip process step | Stacie Y. Brown | 2001-12-04 |