Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759179 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio +3 more | 2004-07-06 |
| 6649525 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio +3 more | 2003-11-18 |
| 6524869 | Method and apparatus for detecting ion implant induced defects | Michael J. Satterfield, Laura Pressley, Terri A. Couteau, Bryon K. Hance, David M. Hendrix | 2003-02-25 |
| 6440621 | Method of detecting film defects using chemical exposure of photoresist films | Christopher H. Lansford | 2002-08-27 |