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Sidewall spacer pullback scheme |
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2009-12-29 |
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Method to obtain uniform nitrogen profile in gate dielectrics |
Ajith Varghese, Reima Laaksonen |
2008-10-14 |
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Method for adjusting rapid thermal processing (RTP) recipe setpoints based on wafer electrical test (WET) parameters |
William J. Campbell |
2005-02-15 |
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Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP) |
William J. Campbell |
2004-11-16 |
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Method and apparatus for using tool state information to identify faulty wafers |
Qingsu Wang, Glen W. Scheid, Kent Knox |
2004-05-18 |
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Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework |
Elfido Coss, Jr., Qingsu Wang |
2004-04-20 |
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Method and apparatus for fault model analysis in manufacturing tools |
Michael L. Miller, Qingsu Wang |
2004-02-24 |
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Wafer-less qualification of a processing tool |
Qingsu Wang, Michael R. Conboy, Michael L. Miller, W. Jarrett Campbell |
2003-09-30 |
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2001-11-27 |
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Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization |
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2001-07-31 |