Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7638402 | Sidewall spacer pullback scheme | Mahalingam Nandakumar, Amitava Chatterjee | 2009-12-29 |
| 7435651 | Method to obtain uniform nitrogen profile in gate dielectrics | Ajith Varghese, Reima Laaksonen | 2008-10-14 |
| 6856849 | Method for adjusting rapid thermal processing (RTP) recipe setpoints based on wafer electrical test (WET) parameters | William J. Campbell | 2005-02-15 |
| 6819963 | Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP) | William J. Campbell | 2004-11-16 |
| 6738731 | Method and apparatus for using tool state information to identify faulty wafers | Qingsu Wang, Glen W. Scheid, Kent Knox | 2004-05-18 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Elfido Coss, Jr., Qingsu Wang | 2004-04-20 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Michael L. Miller, Qingsu Wang | 2004-02-24 |
| 6629012 | Wafer-less qualification of a processing tool | Qingsu Wang, Michael R. Conboy, Michael L. Miller, W. Jarrett Campbell | 2003-09-30 |
| 6324341 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Qingsu Wang, Michael L. Miller, William J. Campbell, Jeff Thompson | 2001-11-27 |
| 6268270 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Glen W. Scheid, Qingsu Wang, Michael L. Miller, Si QIN | 2001-07-31 |