Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6738731 | Method and apparatus for using tool state information to identify faulty wafers | Terrence J. Riley, Qingsu Wang, Kent Knox | 2004-05-18 |
| 6268270 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Terrence J. Riley, Qingsu Wang, Michael L. Miller, Si QIN | 2001-07-31 |