Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968303 | Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing | Elfido Coss, Jr. | 2005-11-22 |
| 6738731 | Method and apparatus for using tool state information to identify faulty wafers | Terrence J. Riley, Glen W. Scheid, Kent Knox | 2004-05-18 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Elfido Coss, Jr., Terrence J. Riley | 2004-04-20 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Michael L. Miller, Terrence J. Riley | 2004-02-24 |
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Michael R. Conboy, Michael L. Miller, W. Jarrett Campbell | 2003-09-30 |
| 6556959 | Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers | Michael L. Miller | 2003-04-29 |
| 6556882 | Method and apparatus for generating real-time data from static files | Michael R. Conboy, Elfido Coss, Jr. | 2003-04-29 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Thomas J. Sonderman, Elfido Coss, Jr. | 2003-04-08 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Michael L. Miller, Elfido Coss, Jr. | 2003-03-11 |
| 6324341 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Terrence J. Riley, Michael L. Miller, William J. Campbell, Jeff Thompson | 2001-11-27 |
| 6268270 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Glen W. Scheid, Terrence J. Riley, Michael L. Miller, Si QIN | 2001-07-31 |
| 5914879 | System and method for calculating cluster tool performance metrics using a weighted configuration matrix | Craig W. Christian, John B. Crowley, Denver L. Dolman | 1999-06-22 |
| 5859964 | System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes | Gerald W. Barnett, R. Michael Greig, Yi Cheng | 1999-01-12 |
| 5740429 | E10 reporting tool | John G. Zvonar, Mike Simpson | 1998-04-14 |