Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6215896 | System for enabling the real-time detection of focus-related defects | Robert T. Stone, Mark Shackelford | 2001-04-10 |
| 5859964 | System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes | Qingsu Wang, Gerald W. Barnett, Yi Cheng | 1999-01-12 |